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School of Engineering · ANU College of Systems and Society
This is an interdisciplinary course interfering with biomedical-sensing, mechanics, materials, structures, electronic systems, micro-/nano-fabrication and the disciplines of physics and chemistry. MEMS/NEMS (Micro/Nano Electro-Mechanical System) technology, which integrates various micro/nano-sale sensors and actuators on a single chip, are becoming important as biological probes for molecule level mechanical sensing and manipulation. This course will discuss the fundamentals of bio-MEMS, micro-structures, micro-fludics, micro-sensors and micro-actuators. It includes simple micro-electro-mechanical systems, scaling electronic and mechanical systems to the micro-/nano-meter scale bio-sensors, material issues, and the integration of micromechanical structures and actuators with simple electronics. Main topics: • Micro -fabrication and Micro-structures • Bio-sensors based on mechanical resonator • Surface functionalization • Bio-molecule mass transportation • Micro-fludics for bio-sensing • Bio-molecule interaction • Bio-sensing sensitivity and limitation
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