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School of Engineering · ANU College of Systems and Society
This is an interdisciplinary course that combines biomedical-sensing, mechanics, materials, structures, electronic systems, micro-/nano-fabrication and the disciplines of physics and chemistry. MEMS/NEMS (Micro/Nano Electro-Mechanical System) technology, which integrates various micro/nano-sale sensors and actuators on a single chip, are becoming important as biological probes for molecule level mechanical sensing and manipulation. This course will discuss the fundamentals of bio-MEMS, micro-structures, micro-fluidics, micro-sensors and micro-actuators. It includes simple micro-electro-mechanical systems, scaling electronic and mechanical systems to the micro-/nanometer scale bio-sensors, material issues, and the integration of micromechanical structures and actuators with simple electronics.
Report
Learning outcomes 1, 2, 3, 4
Research Project
Learning outcomes 4, 5, 6
Seminar Presentation
Learning outcomes 3, 4, 5, 6
Final Exam
Learning outcomes 1, 2, 3, 4, 5
130 hours per semester consisting of the following activities each week: - 1.5 hours lectures - 1.5 hours tutorial - 7 hours of pre-reading and self-directed study Other Information Professional Skills Mapping Mapping of Learning Outcomes to Assessment and Professional Competencies
None Preliminary Reading Nadimhttp://www.amazon.com/Nadim-Maluf/e/B001K8ATHK/ref=ntt_athr_dp_pel_1Maluf and KirtWilliams, “An Introduction to Microelectromechanical Systems Engineering,”, 2nd Edition, 2004, Artech House, · ISBN: 978-1580535908 Chang Liu, “Foundations of MEMS,” 2nd Edition, 2011, Prentice Hall, ISBN: 978-0132497367 Marc J.Madou , “Fundamentals of Microfabrication: The Science of Miniaturization,” 3rd Edition, CRC Press, 2011, ISBN: 978-0849331800 Tai-Ran Hsu, “MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering,” 2nd edition, Wiley, 2008, ISBN: 978-0470083017